Article 5221

Title of the article

Control features of the metal-ceramic seal in vacuum switching devices 


Elena A. Alimova, Engineer-metrologist, Research Institute of Electronic and Mechanical Devices (44 Karakozova street, Penza, Russia); postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: 

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Background. The object of the research is the metal-ceramic seals of the vacuum switching devices. The subject of the research is the thickness and chemical composition influence of the metallized layer on the adhesion quality with the ceramic body of vacuum switching devices. The purpose of this work is to study the reasons affecting the vacuum density of vacuum switching devices. Materials and methods. The research of nickel and corundum ceramics soldering of the VK94 and VK95 types was carried out in this work. To achieve this goal the methods of scanning electron microscopy and electron probe microanalysis were used. Results. The reasons influencing the vacuum density of vacuum switching devices are established and recommendations for its improvement are given. Conclusions. It is shown that the introduction of scanning electron microscopy methods into the technological processes of the electronic devices production makes it possible to increase the control reliability at the nanoscale level that leads to an improvement in the tactical and technical characteristics of finished products. 

Key words

ceramics, metal-ceramic seal, metallization layer, fractographic analysis, scanning electron microscopy, nickel layer thickness 

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Дата создания: 20.09.2021 11:47
Дата обновления: 20.09.2021 12:11